Method of manufacturing semiconductor device

ABSTRACT

It is prevented that when a predetermined number of semiconductor chips having transistors are manufactured from one semiconductor wafer, manufacturing cost of a semiconductor device is increased due to excess semiconductor chips manufactured from the semiconductor wafer. A first bipolar transistor including a first emitter region having a first area is formed in a first chip formation region in an exposure region that can be exposed by one exposure step, and a second bipolar transistor including a second emitter region having a second area different from the first area is formed in a second chip formation region in the exposure region.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Continuation application of U.S. application Ser.No. 15/278,332 filed on Sep. 28, 2016 which in turn claims the benefitof the disclosure of Japanese Patent Application No. 2015-215001 filedon Oct. 30, 2015, the specification, drawings and abstract of which areincorporated herein by reference in their entirety.

BACKGROUND

The present invention relates to a method of manufacturing asemiconductor device. For example, the invention is usable formanufacturing a semiconductor device having a bipolar transistor.

Each of transistors to be used for current amplification has anamplification factor (h_(FE)) having a value corresponding to aspecification of the transistor. As a method of suppressing variationsin amplification factor h_(FE) characteristics between a plurality oftransistors formed from one semiconductor wafer in a manufacturingprocess of a semiconductor device, it is known that a vertical furnaceis used instead of a horizontal furnace in a heat treatment step fordiffusing an impurity introduced into a semiconductor substrate.

Japanese Unexamined Patent Application Publication No. Hei 5(1993)-67739describes that part of a surface of a semiconductor wafer is coveredwith a mask, and emitter regions of some transistors are modifiedcrystallographically or metallurgically, thereby the amplificationfactor h_(FE) of each of such transistors is varied.

SUMMARY

A large number of semiconductor chips each including a transistor havinga predetermined h_(FE) characteristic can be produced from onesemiconductor wafer. If a small number of semiconductor chips arenecessary among the semiconductor chips produced in such a way, theremaining semiconductor chips, which are also produced from thesemiconductor wafer, are not necessary.

Recently, the number of semiconductor chips producible from onesemiconductor wafer increases with an increase in diameter of asemiconductor wafer. In addition, improvement in heating techniqueimproves uniformity of h_(FE) characteristics between the transistors ofthe semiconductor chips produced from one semiconductor wafer. Hence,when a small number of semiconductor chips each including a transistorhaving predetermined h_(FE) characteristics are desired to be produced,and if a large number of such semiconductor chips are manufactured fromone semiconductor wafer, unnecessary semiconductor chips are excessivelysupplied, which increases manufacturing cost of a semiconductor device.

The technique of crystallographically or metallurgically modifying theemitter region as described in Japanese Unexamined Patent ApplicationPublication No. Hei 5(1993)-67739 is technically difficult to accuratelycontrol the h_(F) characteristics and therefore difficult to produce atransistor having desired characteristics.

Other issues and novel features will be clarified from the descriptionof this specification and the accompanying drawings.

A typical embodiment disclosed in this application is briefly summarizedas follows.

A method of manufacturing a semiconductor device as one embodiment is toproduce various semiconductor chips including transistors, which haveemitter regions having different areas, from one semiconductor wafer.

According to the embodiment, manufacturing cost of the semiconductordevice can be decreased. In particular, unnecessary chips can beprevented from being produced from the semiconductor wafer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view of a semiconductor device as one embodiment duringa manufacturing process of the semiconductor device.

FIG. 2 is a plan view of the semiconductor device as the embodimentduring the manufacturing process.

FIG. 3 includes sectional views of the semiconductor device as theembodiment during the manufacturing process.

FIG. 4 includes sectional views of the semiconductor device during themanufacturing process following FIG. 3.

FIG. 5 is a plan view of the semiconductor device during themanufacturing process following FIG. 4.

FIG. 6 includes sectional views of the semiconductor device during themanufacturing process following FIG. 4.

FIG. 7 includes sectional views of the semiconductor device during themanufacturing process following FIG. 5.

FIG. 8 is a plan view of the semiconductor device during themanufacturing process following FIG. 7.

FIG. 9 includes sectional views of the semiconductor device during themanufacturing process following FIG. 7.

FIG. 10 is a sectional view of a vertical furnace used in themanufacturing process of the semiconductor device as the embodiment.

FIG. 11 includes sectional views of the semiconductor device during themanufacturing process following FIG. 9.

FIG. 12 includes sectional views of the semiconductor device during themanufacturing process following FIG. 11.

FIG. 13 includes sectional views of the semiconductor device during themanufacturing process following FIG. 12.

FIG. 14 is a plan view of the semiconductor device during themanufacturing process following FIG. 12.

FIG. 15 includes plan views of the semiconductor device during themanufacturing process following FIG. 13.

FIG. 16 is a graph showing a relationship between size of an emitterregion and amplification factor characteristics.

FIG. 17 is a plan view of a semiconductor device as a modification ofthe embodiment during a manufacturing process of the semiconductordevice.

FIG. 18 is a plan view of a semiconductor device as a comparativeexample during a manufacturing process of the semiconductor device.

FIG. 19 is a sectional view of a horizontal furnace used in amanufacturing process of a semiconductor device as a comparativeexample.

DETAILED DESCRIPTION

Hereinafter, one embodiment of the invention will be described in detailwith reference to the accompanying drawings. In all drawings forexplaining the following embodiment, components having the same functionare designated by the same numeral, and duplicated description isomitted. In the following embodiment, the same or similar portion is notrepeatedly described in principle except for a particularly requiredcase.

This embodiment is embodied as a semiconductor device including abipolar transistor. Although this embodiment is described on an npnbipolar transistor, the semiconductor device of this embodiment can beapplied to a pnp bipolar transistor having an opposite conductivitytype, and thus effects similar to those for the npn bipolar transistorcan be provided for the pnp bipolar transistor.

Manufacturing Method of Semiconductor Device

A method of manufacturing a semiconductor device of this embodiment isnow described with reference to FIGS. 1 to 15.

FIGS. 1, 2, 5, 8, 14, and 15 are each a plan view of the semiconductordevice of this embodiment during a manufacturing process of thesemiconductor device. FIGS. 3, 4, 6, 7, 9, 11, 12, and 13 each includesectional views of the semiconductor device of this embodiment duringthe manufacturing process. FIG. 10 is a sectional view of a verticalfurnace used in the manufacturing process of the semiconductor device ofthis embodiment.

In each of FIGS. 3, 4, 6, 7, 9, 11, 12, and 13, a first region 1A isshown on the left side, and a second region 1B is shown on the rightside. Specifically, a section along a line A-A in FIG. 2 is shown on theleft side of FIG. 3, and a section along a line B-B in FIG. 2 is shownon the right side thereof. Similarly, FIG. 6 shows a section along aline A-A and a section along a line B-B in FIG. 5. FIG. 9 shows asection along a line A-A and a section along a line B-B in FIG. 8.

The first region 1A and the second region 1B are arranged along a mainsurface of the same semiconductor substrate (semiconductor wafer), andare regions between which different types of semiconductor chips are tobe formed. Each of FIGS. 1, 2, 5, 8, and 14 does not show a film (forexample, insulating film) above the semiconductor substrate.

In the manufacturing process of the semiconductor device, first, asillustrated in FIGS. 1 to 3, a semiconductor substrate SB, i.e., asemiconductor wafer WF is provided, the semiconductor substrateincluding n single-crystal silicon (Si) having a specific resistance of,for example, about 1 to 100 Ω·cm. Subsequently, an epitaxial layer EP isformed on the semiconductor substrate SB by an epitaxial growth process.The epitaxial layer EP is an n semiconductor layer. The semiconductorsubstrate SB and the epitaxial layer EP each include an n impurity (forexample, arsenic (As) or phosphorous (P)). The semiconductor substrateSB has an n-impurity concentration larger than the epitaxial layer EP.The semiconductor substrate SB and the epitaxial layer EP collectivelyserve as a collector region of a bipolar transistor formed later.

The semiconductor wafer WF described in this application refers to asubstrate including the semiconductor substrate SB and films providedabove and below the semiconductor substrate SB at a time point before adicing step as described later using FIG. 15. Specifically, thesemiconductor wafer WF illustrated in FIG. 1 includes a stack includingthe semiconductor substrate SB and the epitaxial layer EP. In thisembodiment, the stack including the semiconductor substrate SB and theepitaxial layer EP may be referred to as substrate or semiconductorsubstrate. Specifically, a bipolar transistor described later is asemiconductor element provided in the semiconductor substrate.

As illustrated in FIG. 1, the semiconductor wafer WF has a shape similarto a circular shape in plan view. The semiconductor wafer WF has alinear ground portion called orientation flat at part of its end inorder to determine crystal orientation of the semiconductor wafer WF.The semiconductor wafer WF may have a cutout portion called notch atpart of its end instead of providing the orientation flat.

Each thick straight line shown in a grid pattern on a main surface ofthe semiconductor wafer WF in FIG. 1 is a boundary of an exposure regionSH that is exposed by one exposure step (shot) out of a plurality oftimes of exposure in an exposure step in the manufacturing process ofthe semiconductor device. In this case, the entire main surface of thesemiconductor wafer WF is exposed by the plurality of times of exposurewhile an exposure position is shifted every exposure step. A pluralityof exposure regions SH are arranged in an X direction as a directionalong a main surface of the semiconductor substrate SB (see FIG. 3) andin a Y direction as a direction along the main surface of thesemiconductor substrate SB and orthogonal to the X direction.Specifically, the exposure regions SH are arranged in rows and columnson the top of the semiconductor wafer WF, and each have a rectangularshape in plan view.

FIG. 2 illustrates one exposure region SH as part of the top of thesemiconductor wafer WF (see FIG. 1) in an enlarged manner. A pluralityof chip formation regions CE are arranged in rows and columns in the Xdirection (row direction) and in the Y direction (column direction) inthe exposure region SH. FIG. 2 exemplarily shows a layout in which ninechip formation regions CE exist in one exposure region SH. Each of thechip formation regions CE is formed into one semiconductor chip throughlater steps. FIG. 2 shows a boundary between the adjoining chipformation regions CE by a broken line. Any of the exposure regions SHshown in FIG. 1 has a layout similar to that of the exposure region SHillustrated in FIG. 2. Each of FIGS. 5 and 8 used in later descriptionalso illustrates one exposure region SH as with FIG. 2.

In one exposure region SH illustrated in FIG. 2, the leftmost column isreferred to as first region 1A, the middle column is referred to assecond region 1B, and the rightmost column is referred to as thirdregion 1C. Specifically, each of the first region 1A, the second region1B, and the third region 1C includes three chip formation regions CEthat are vertically arranged in a column in the exposure region SH.Since each of the exposure regions SH illustrated in FIG. 1 also has thefirst region 1A, the second region 1B, and the third region 1C, each ofthe first region 1A, the second region 1B, and the third region 1Cextends from one end to the other end of the semiconductor wafer WF inthe Y direction.

The first region 1A, the second region 1B, and the third region 1C areregions between which bipolar transistors having differentcharacteristics are to be formed. Specifically, a transistor to beformed in the first region 1A has characteristics different from thosein the second region 1B, a transistor to be formed in the second region1B has characteristics different from those in the third region 1C, anda transistor to be formed in the third region 1C has characteristicsdifferent from those in the first region 1A.

FIG. 3 shows sectional views of the substrate in the first region 1A andthe substrate in the second region 1B. The section of the first region1A illustrated in FIG. 3 corresponds to a section of one chip formationregion CE illustrated in FIG. 2. The section of the second region 1Billustrated in FIG. 3 corresponds to a section of another chip formationregion CE illustrated in FIG. 2. In other words, the first region 1A andthe second region 1B in FIG. 3 are formed into different semiconductorchips in a later step. In the following description of a manufacturingprocess, a manufacturing process for the first region 1A and the secondregion 1B is mainly described, and a manufacturing process for the thirdregion 1C is not specifically described. However, a bipolar transistoris also formed in the third region 1C by the same process as that ineach of the first region 1A and the second region 1B.

Subsequently, as illustrated in FIG. 4, an insulating film IF1 coveringthe top of the epitaxial layer EP is formed by performing heattreatment, for example. The insulating film IF1 is, for example, athermally oxidized film, and includes a silicon oxide film.

Subsequently, as illustrated in FIGS. 5 and 6, part of the insulatingfilm IF1 is removed using a photolithography technique and a dry etchingprocess. The insulating film IF1 is thus patterned, thereby part of thetop of the epitaxial layer EP is exposed from the insulating film IF1 ineach of the first and second regions 1A and 1B. In this case, the top ofthe epitaxial layer EP is exposed in a central portion in plan view ofeach chip formation region CE (see FIG. 2). In other words, theinsulating film IF1 remains annularly so as to cover the edge of thechip formation region CE.

In the photolithography technique described herein, a photoresist film(photosensitive film) is formed on the substrate by a coating process,and is exposed with, for example, ultraviolet rays through a photomask(reticule) so that a pattern is transferred, and then part of thephotoresist film is removed by performing a development step, thereby anundepicted photoresist pattern is formed. Since only a pattern in alimited range can be transferred by exposure in one exposure step, theentire semiconductor wafer WF (see FIG. 1) cannot be exposed by one-timeexposure. Hence, each of the exposure regions SH illustrated in FIG. 1is subjected to exposure.

A photoresist film is applied onto the insulating film IF1.Subsequently, the photoresist film is subjected to exposure anddevelopment to remove part of the photoresist film. Consequently, partof the top of the insulating film IF1 is exposed from the photoresistfilm. Subsequently, a photoresist pattern including the photoresistfilm, which is formed through the exposure-and-development step, is usedas a mask for dry etching. Consequently, the insulating film IF1 in thearea exposed from the photoresist pattern is removed, thereby part ofthe top of the epitaxial layer EP, i.e., part of the top of thesubstrate is exposed. The photoresist film is removed after the dryetching step.

Subsequently, a p impurity (for example, boron (B)) is implanted intothe top of the epitaxial layer EP by an ion implantation process withthe insulating film IF1 as a mask. Consequently, a base region PB as a psemiconductor region is formed in a region, into which the p impurity isintroduced, in the epitaxial layer EP. The base region PB is formed inthe central portion in plan view in each of the chip formation regionsCE in each of the first region 1A, the second region 1B, and the thirdregion 1C. The base region PB has, for example, a rectangular shape inplan view. The base region PB is provided from the top of the epitaxiallayer EP to an intermediate depth of the epitaxial layer EP. That is,the bottom of the base region PB does not reach the interface betweenthe epitaxial layer EP and the semiconductor substrate SB.

Subsequently, as illustrated in FIG. 7, an insulating film IF2 coveringthe top of the epitaxial layer EP is formed by performing heattreatment, for example. The insulating film IF2 is formed on the top ofthe epitaxial layer EP exposed from the insulating film IF1 in eachsection illustrated in FIG. 6. FIG. 7 does not show the boundary betweenthe insulating films IF1 and IF2. The insulating film IF2 has athickness smaller than the insulating film IF1. The insulating film IF2is, for example, a thermally oxidized film, and includes a silicon oxidefilm.

Subsequently, part of the insulating film IF2 is removed using aphotolithography technique and a dry etching process. The insulatingfilm IF2 is thus patterned, thereby part of the top of the base regionPB is exposed from the insulating films IF1 and IF2 in each of the firstand second regions 1A and 1B. The entire region over which theinsulating film IF2 is opened overlaps with the base region PB in planview. The openings of the insulating film IF2 are formed at, forexample, three points in each chip formation region CE (see FIG. 5).Each opening of the insulating film IF2 has a shape of rectangle longerin the Y direction in plan view. Width of the opening in the X directionis different between the first region 1A, the second region 1B, and thethird region 1C.

Subsequently, as illustrated in FIGS. 8 and 9, an n impurity (forexample, arsenic (As) or phosphorous (P)) is implanted into the top ofthe base region PB by an ion implantation process with the insulatingfilms IF1 and IF2 as a mask. Consequently, emitter regions NE1, NE2, andNE3 as n semiconductor regions are formed in the respective regions,into which the n impurity is introduced, in the base regions PB.

Three emitter regions NE1 are formed side by side in the X direction onthe top of the base region PB in each chip formation region CE of thefirst region 1A. Three emitter regions NE2 are formed side by side inthe X direction on the top of the base region PB in each chip formationregion CE of the second region 1B. Three emitter regions NE3 are formedside by side in the X direction on the top of the base region PB in eachchip formation region CE of the third region 1C.

Each of the emitter regions NE1, NE2, and NE3 is formed from the top ofthe base region PB to an intermediate depth of the base region PB. Thatis, the bottom of each of the emitter regions NE1, NE2, and NE3 does notreach the interface between the base region PB and the epitaxial layerEP.

The shape in plan view of each of the emitter regions NE1, NE2, and NE3is a rectangle longer in the Y direction. The emitter regions NE1, NE2,and NE3 have the same width in the Y direction. In other words, each ofthe emitter regions NE1, NE2, and NE3 has a length Y1 in the Ydirection. The length X1 in the X direction of the emitter region NE1 issmaller than the length Y1 and smaller than the length X2 in the Xdirection of the emitter region NE2. The length X2 in the X direction ofthe emitter region NE2 is smaller than the length Y1 and smaller thanthe length X3 in the X direction of the emitter region NE3. The lengthX3 in the X direction of the emitter region NE3 is smaller than thelength Y1.

Specifically, the emitter regions NE1, NE2, and NE3 having differentwidths in the X direction and different areas in plan view are formed onthe top of the semiconductor wafer WF (see FIG. 1) and in the exposureregion SH that ca be exposed by one exposure step (shot).

Subsequently, the semiconductor wafer WF is heated using a diffusionfurnace (heating furnace) illustrated in FIG. 10 in order to diffuse theimpurities implanted in the ion implantation steps, i.e., diffuse theimpurities in the base regions and the emitter regions. The diffusionfurnace VF illustrated in FIG. 10 is a vertical furnace. Specifically,the diffusion furnace VF has a cylindrical furnace core tube (quartztube) FT extending in a direction perpendicular to a horizontal plane.The furnace core tube FT is a container that accommodates a plurality ofsemiconductor wafers WF to be heated. In a heating step, thesemiconductor wafers WF supported by a wafer holder WH are arranged inthe extending direction of the furnace core tube FT in the furnace coretube FT. At this time, the main surface of each semiconductor wafer WFis parallel to the horizontal plane.

In other words, an angle defined by the extending direction of thefurnace core tube FT and the direction perpendicular to the horizontalplane is smaller than an angle defined by the extending direction of thefurnace core tube FT and the horizontal plane. An angle defined by thetop of a semiconductor wafer WF disposed in the furnace core tube FT andthe horizontal plane is smaller than an angle defined by the top of thesemiconductor wafer WF and the direction perpendicular to the horizontalplane.

The wafer holder WH and the semiconductor wafer WF are encapsulated inan ampule AP including, for example, quartz in the furnace core tube FT.The inside of the ampule AP is in a vacuum state. An annular electricfurnace EF is disposed outside of the furnace core tube FT so as tosurround the horizontal periphery of the ampule AP encapsulating thesemiconductor wafer WF. In the step of performing the heating treatmentfor diffusing the impurity, the electric furnace EF is energized toproduce heat so as to heat the semiconductor wafer WF in the furnacecore tube FT surrounded by the electric furnace EF.

The heating step using the vertical furnace can prevent part of thesemiconductor wafer WF from locally receiving stress applied when thesemiconductor wafer WF is supported by the wafer holder WH. Hence, thevertical furnace allows the entire surface of the semiconductor wafer WFto be evenly heated compared with a horizontal furnace described later.Consequently, the impurity ion implanted into the semiconductorsubstrate SB in each of the ion implantation steps can be evenlydiffused at any place in the main surface of the semiconductor wafer WF.

Through such steps, as illustrated in FIG. 9, the npn bipolar transistorTR1 having the semiconductor substrate SB and the epitaxial layer EP asthe collector region, the base region PB, and the emitter region NE1 isformed in the first region 1A. Similarly, the npn bipolar transistor TR2having the semiconductor substrate SB and the epitaxial layer EP as thecollector region, the base region PB, and the emitter region NE2 isformed in the second region. Similarly, the bipolar transistor TR3having the semiconductor substrate SB as the collector region, theemitter region NE3, and the base region PB is formed in the third regionillustrated in FIG. 8.

Subsequently, as illustrated in FIG. 11, an insulating film IF3 coveringthe top of the epitaxial layer EP is formed by performing heattreatment, for example. The insulating film IF3 is formed on the top ofthe epitaxial layer EP exposed from the insulating films IF1 and IF2 inthe section illustrated in FIG. 9. FIG. 11 does not show the boundarybetween the insulating films IF1 and IF2 and the boundary between theinsulating films IF2 and IF3. The insulating film IF3 has a thicknesssmaller than the insulating film IF2. The insulating film IF3 is, forexample, a thermally oxidized film, and includes a silicon oxide film.

Subsequently, part of each of the insulating films IF2 and IF3 isremoved using a photolithography technique and a dry etching process.The insulating films IF2 and IF3 are thus patterned, thereby part ofeach of the tops of the emitter region NE1, the emitter region NE2, andthe base region PB is exposed from the insulating films IF2 and IF3.

In planar view, the entire region, over which the insulating film IF3 isopened, is located inside of the opening formed in the insulating filmIF2 in the patterning step described with FIG. 7. Hence, only the top ofthe emitter region NE1 is exposed on the bottom of the opening of theinsulating film IF3 in the first region 1A, and only the top of theemitter region NE2 is exposed on the bottom of the opening of theinsulating film IF3 in the second region 1B. The opening of theinsulating film IF3 is formed in each opening of the insulating filmIF2. Three openings of the insulating film IF3 are therefore formed sideby side in the X direction in plan view in each of the first region 1Ato the third region 1C.

Only the top of the base region PB is exposed on the bottom of theopening penetrating through the insulating film IF2, the opening beingformed in each of the first region 1A and the second region 1B in thepatterning step. The opening of the insulating film IF2 is disposedalongside of the opening of the insulating film IF3 in the X-axisdirection in the vicinity of each opening penetrating through theinsulating film IF3. Specifically, some of the openings of theinsulating film IF2 are each formed between the openings of theinsulating film IF3 arranged in the X direction in each of the firstregion 1A to the third region 1C (see FIG. 8).

Subsequently, as illustrated in FIG. 12, a metal film MF is formed onthe semiconductor substrate SB by a sputtering process, for example. Themetal film MF includes an aluminum (Al) film, for example.

Subsequently, as illustrated in FIG. 13, part of the metal film MF isremoved using a photolithography technique and a dry etching process.The metal film MF is thus patterned, thereby an emitter electrode EE anda base electrode BE, which each include the metal film MF, are formed onthe semiconductor substrate SB in each of the first region 1A and thesecond region 1B. The emitter electrode EE in the first region 1A iscoupled to the top of the emitter region NE1 on the bottom of theopening of the insulating film IF3. The emitter electrode EE in thesecond region 1B is coupled to the top of the emitter region NE2 on thebottom of the opening of the insulating film IF3. The base electrode BEin the first region 1A is formed next to the emitter electrode EE, andis coupled to the top of the base region PB on the bottom of the openingof the insulating film IF2. The base electrode BE in the second region13 is formed next to the emitter electrode EE, and is coupled to the topof the base region PB on the bottom of the opening of the insulatingfilm IF2.

Subsequently, a collector electrode CLE is formed, which is coupled tothe back on a side opposite to the main surface of the semiconductorsubstrate SB while covering the back. The collector electrode CLE can beformed by a sputtering process, for example. The collector electrode CLEhas a stacked structure including, for example, a titanium (Ti) film anda gold (Au) film stacked in this order from the back side. The emitterelectrode EE is electrically coupled to the emitter region NE1 in thefirst region 1A. The emitter electrode EE is electrically coupled to theemitter region NE2 in the second region 1B. The base electrode BE iselectrically coupled to the base region PB, and the collector electrodeCLE is electrically coupled to the semiconductor substrate SB as thecollector region in each of the first region 1A and the second region1B.

FIG. 14 distinctively illustrates the first region 1A, the second region1B, and the third region 1C on the main surface of the semiconductorwafer WF. In FIG. 14, the second region 1B and the third region 1C aredifferently hatched, while the first region 1A is not hatched. Eachexposure region SH partitioned by a thick line in FIG. 14 has the firstregion 1A, the second region 1B, and the third region 1C arranged in theX direction. FIG. 14 does not illustrate individual chip formationregions CE (see FIG. 8).

As illustrated in FIG. 8, in the first region 1A, a plurality of chipformation regions CE, each including three bipolar transistors TR1, arearranged in the Y-axis direction. In the second region 1B, a pluralityof chip formation regions CE, each including three bipolar transistorsTR2, are arranged in the Y-axis direction. In the third region 1C, aplurality of chip formation regions CE, each including three bipolartransistors TR3, are arranged in the Y-axis direction. FIG. 14 shows aposition of the first region 1A having the bipolar transistors TR1 (seeFIG. 8), a position of the second region 1B having the bipolartransistors TR2 (see FIG. 8), and a position of the third region 1Chaving the bipolar transistors TR3 (see FIG. 8).

Subsequently, as illustrated in FIG. 15, a plurality of semiconductorchips are produced by performing a dicing step. Specifically, thesemiconductor wafer WF is cut using a dicing blade along scribe linesshown by a broken line and a thick line in FIG. 8, and thus thesemiconductor wafer WF (see FIG. 14) is divided into individual chips.The semiconductor devices of this embodiment, i.e., a plurality ofsemiconductor chips CP1, a plurality of semiconductor chips CP2, and aplurality of semiconductor chips CP3, can be provided through this step.

FIG. 15 shows plan views of the semiconductor chips each including theemitter electrode EE and the base electrode BE on the upper side of thedrawing, and shows plan views of the semiconductor chips while omittingthe emitter electrode EE, the base electrode BE, and the insulatingfilm. Each plan view on the upper side of FIG. 15 shows a contour of aportion at which each electrode is coupled to the semiconductorsubstrate.

The semiconductor chip CP1 is produced from the chip formation region CE(see FIG. 8) of the first region 1A (see FIGS. 13 and 14) through thedicing step, and includes the bipolar transistors TR1 formed in thesemiconductor substrate SB. The semiconductor chip CP2 is produced fromthe chip formation region CE of the second region 1B (see FIGS. 13 and14) through the dicing step, and includes the bipolar transistors TR2formed in the semiconductor substrate SB. The semiconductor chip CP3 isproduced from the chip formation region CE of the third region 1C (seeFIG. 14) through the dicing step, and includes the bipolar transistorsTR3 formed in the semiconductor substrate SB.

The semiconductor chip CP1 does not include the bipolar transistors TR2and TR3, the semiconductor chip CP2 does not include the bipolartransistors TR1 and TR3, and the semiconductor chip CP3 does not includethe bipolar transistors TR1 and TR2.

As illustrated in FIG. 15, each of the emitter electrode EE and the baseelectrode BE has a comb shape in plan view. Specifically, each of theemitter electrode EE and the base electrode BE has a portion extendingin the X direction in the vicinity of one end in the Y direction of eachchip, and a plurality of extensions extending in the Y direction fromthat portion toward the other end in the Y direction of that chip. Theextensions are disposed side by side in the X direction. The extensionsextending in the Y direction of the emitter electrode EE and theextensions extending in the Y direction of the base electrode BE arealternately disposed side by side in the X direction.

The extensions extending in the Y direction of the emitter electrode EEare each coupled to the emitter region NE1, NE2, or NE3 on the mainsurface of the semiconductor substrate SB directly below the extensions.Similarly, the extensions extending in the Y direction of the baseelectrode BE are each coupled to the base region PB on the main surfaceof the semiconductor substrate SB directly below the extensions.

Three emitter regions NE1 are disposed side by side in the X directionon the main surface of the semiconductor substrate SB of thesemiconductor chip CP1. Three emitter regions NE2 are disposed side byside in the X direction on the main surface of the semiconductorsubstrate SB of the semiconductor chip CP2. Three emitter regions NE3are disposed side by side in the X direction on the main surface of thesemiconductor substrate SB of the semiconductor chip CP3.

FIG. 15 shows signs TR1 to TR3 assuming that the bipolar transistors TR1to TR3 are provided in respective portions of the semiconductorsubstrate SB, the portions overlapping with the regions, in which theemitter regions NE1, NE2, and NE3 are formed, in plan view. In apossible case, however, one bipolar transistor is provided for each ofthe semiconductor chips. The three emitter regions in one semiconductorchip are electrically coupled to one another by the emitter electrode.

The emitter region NE1 configuring the bipolar transistor TR1 of thesemiconductor chip CP1, the emitter region NE2 configuring the bipolartransistor TR2 of the semiconductor chip CP2, and the emitter region NE3configuring the bipolar transistor TR3 of the semiconductor chip CP3have different shapes in plan view. The emitter regions NE1, NE2, andNE3, each having a rectangular shape in plan view, have the same widthin the Y direction, but have different widths in the X direction.

In other words, the length X1 of the emitter region NE1 is smaller thanthe length X2 of the emitter region NE2, and the length X2 is smallerthan the length X3 of the emitter region NE3 in the X direction. Hence,area of the emitter region NE1 is smaller than area of the emitterregion NE2, and the area of the emitter region NE2 is smaller than areaof the emitter region NE3 in plan view.

An amplification factor (gain) h_(FE) of a bipolar transistorcharacteristically varies depending on area of an emitter region of thebipolar transistor. The amplification factor (gain) h_(FE) described inthis application refers to direct-current amplification factor(direct-current gain) of a transistor, for example.

FIG. 16 shows a graph showing a relationship between the width of theemitter region and the amplification factor h_(FE). The horizontal axisof FIG. 16 indicates width in the X direction of the emitter region, andthe vertical axis thereof indicates the amplification factor h_(FE).FIG. 16 shows measurement results of values of amplification factorsh_(FE) of respective bipolar transistors of semiconductor chips producedfrom three semiconductor wafers. The square plots, circular plots, andtriangular plots in FIG. 16 indicate measurement values for thesemiconductor chips produced from the separate semiconductor wafers. Thebipolar transistors used for the measurement have the same width in theY direction. Consequently, area of the emitter region varies directlywith the width in the X direction.

As illustrated in FIG. 16, for example, the length X as emitter openingsize is varied from 0.1 to 4 μm, thereby the amplification factor h_(FE)increases about 1.5 times. In this way, as the width in the X directionof the emitter region increases, the value of the amplification factorh_(FE) of the bipolar transistor increases. In other words, as the areaof the emitter region increases, the amplification factor h_(FE) of thebipolar transistor increases. This is because an area ratio of the baseto the emitter, which determines the amplification factorcharacteristics, is varied by varying the area of the emitter region. Inthis way, area of the emitter region is varied, thereby theamplification factor h_(FE) of the bipolar transistor can be controlledto any value.

Effects of Embodiment

The effects of the manufacturing method of this embodiment are nowdescribed with FIGS. 18 and 19 illustrating a comparative example. FIG.18 is a plan view illustrating a manufacturing process of asemiconductor device of a comparative example. FIG. 19 is a sectionalview of a horizontal furnace usable in a manufacturing process of asemiconductor device of another comparative example.

FIG. 18 is a plan view illustrating an exposure region at a point aftera bipolar transistor has been formed in a semiconductor substrate andbefore a dicing step is performed. Specifically, FIG. 18 illustrates anexposure region SH as a range that can be exposed by one exposure step(shot) as with FIG. 8. Chip formation regions CE in the exposure regionSH have the same planar layout. Specifically, emitter regions NE ofbipolar transistors TRX provided in all the chip formation regions CEhave the same length XN in the X direction and the same length YN in theY direction.

Hence, the emitter regions NE of the bipolar transistors TRX in all thechip formation region CE have the same area. In this comparativeexample, therefore, a plurality of semiconductor chips that can beproduced from a semiconductor wafer have transistors having the sameamplification factor characteristics.

A diffusion furnace HF illustrated in FIG. 19 is probably used in a heattreatment step that is performed to diffuse impurities introduced intothe base region PB and the emitter region NE on the top of thesemiconductor substrate illustrated in FIG. 18. The diffusion furnace HFhas a cylindrical furnace core tube (quartz tube) FT extending in ahorizontal direction. In other words, the diffusion furnace HF is ahorizontal furnace. In a heating step, a plurality of semiconductorwafers WF supported by a wafer holder WH in the furnace core tube FT arearranged in an extending direction of the furnace core tube FT. Each ofthe semiconductor wafers WF is supported by the wafer holder WH suchthat the main surface of the semiconductor wafer has an angle close to aright angle with respect to a horizontal plane.

The wafer holder WH and the semiconductor wafer WF are encapsulated inan ampule AP including, for example, quartz in the furnace core tube FT.The inside of the ampule AP is in a vacuum state. An annular electricfurnace EF is disposed outside of the furnace core tube FT. For heating,the electric furnace EF is allowed to produce heat so as to heat thesemiconductor wafer WF.

In the manufacturing process for forming the bipolar transistor TRX ofthe comparative example illustrated in FIG. 18, however, the verticaldiffusion furnace VF illustrated in FIG. 10 is used in the heattreatment step for impurity diffusion. If the horizontal diffusionfurnace HF illustrated in FIG. 19 is used, it is difficult to evenlyheat the entire surface of the semiconductor wafer WF due to, forexample, force applied to a portion at which the semiconductor wafer WFis in contact with the wafer holder WH. In such a case, a level ofimpurity diffusion varies between the chip formation regions of thesemiconductor wafer WF, resulting in variations in characteristics ofsemiconductor chips produced from the semiconductor wafer WF, i.e.,variations in amplification factors h_(FE).

In contrast, the vertical diffusion furnace VF illustrated in FIG. 10can heat the entire surface of the semiconductor wafer WF moreuniformly, making it possible to evenly diffuse impurities in the entiresemiconductor wafer WF. This prevents product failure, and makes itpossible to produce a large number of semiconductor chips includingbipolar transistors having a desired amplification factor h_(FE) fromone semiconductor wafer WF.

A large number of semiconductor chips including transistors having thesame amplification factor h_(FE) can be exclusively manufactured fromone semiconductor wafer including the exposure regions SH of thecomparative example illustrated in FIG. 18. In other words, onlysemiconductor chips having one amplification factor characteristics areproduced from one semiconductor wafer of the comparative example. Inmanufacturing of semiconductor chips having transistors, a plurality oftypes of semiconductor chips with transistors having differentamplification factors h_(FE) may be required to be manufactured suchthat a required number of semiconductor chips are manufactured for eachof the amplification factors h_(FE) depending on a requiredspecification.

For example, a desired number of first semiconductor chips includingtransistors having a first amplification factor and a desired number ofsecond semiconductor chips including transistors having a secondamplification factor different from the first amplification factor maybe required to be manufactured. In such a case, as in the comparativeexample illustrated in FIG. 18, if the chip formation regions CE in thesemiconductor wafer are formed with the same layout, and if only thefirst semiconductor chips including the bipolar transistors TRX havingthe same first amplification factor are thus manufactured from thesemiconductor wafer, a large number of first semiconductor chips, thenumber being larger than the desired number, are produced from thesemiconductor wafer. Unnecessary first semiconductor chips aremanufactured in this way. Hence, when the manufacturing method of thesemiconductor device of the comparative example, which accompaniesproduction of unnecessary semiconductor chips, is used, manufacturingcost of the semiconductor device disadvantageously increases.

In particular, when a small number of semiconductor chips havingpredetermined characteristics are desired to be produced from onesemiconductor wafer WF, an excessively large number of semiconductorchips having such characteristics are produced from the semiconductorwafer WF. As a result, a large number of unnecessary semiconductor chipsare manufactured, and the above-described disadvantage becomes notable.If the semiconductor wafer has a large diameter, a large number ofunnecessary semiconductor chips are manufactured from one semiconductorwafer WF, and thus the above-described disadvantage becomes notable.

When the diffusion treatment is performed using the vertical diffusionfurnace VF illustrated in FIG. 10, semiconductor chips are manufacturedfrom a semiconductor wafer while characteristics of the chips areuniformed compared with a case of using the horizontal diffusion furnaceHF illustrated in FIG. 19. Hence, if a desired number of semiconductorchips having predetermined characteristics are produced, an increasednumber of unnecessary semiconductor chips having such characteristicsare also produced. Consequently, the disadvantage of an increase inmanufacturing cost becomes notable.

A technique for controlling the amplification factor characteristics inthe manufacturing process probably includes a technique of varyingimpurity concentration in the base region or the emitter region, atechnique of varying temperature of heat treatment for impuritydiffusion in the base region or the emitter region, and a technique ofvarying temperature of oxidation treatment. Each of such manufacturingconditions can be varied only in wafers. It is therefore difficult toform various semiconductor chips manufactured under such differentconditions from one semiconductor wafer. In other words, it is difficultto manufacture various semiconductor chips having differentamplification factor characteristics from one semiconductor wafer bysuch a technique of varying the manufacturing condition.

In contrast, in the semiconductor device of this embodiment, asdescribed with FIGS. 7 and 8, emitter regions are formed in differentchip formation regions of a semiconductor wafer in the emitter regionformation step while having areas that are not the same but aredifferent between all the chip formation regions. In other words,bipolar transistors having emitter regions having different areas areformed in different chip formation regions within an exposure region asan area that can be exposed by one exposure step.

Consequently, a plurality of types of semiconductor chips havingdifferent amplification factor characteristics can be produced from onesemiconductor wafer. In this embodiment, as illustrated in FIG. 8, thethree types of emitter regions NE1, NE2, and NE3 having different areasare formed in the first region 1A, the second region 1B, and the thirdregion 1C, respectively. Hence, three types of semiconductor chipsincluding bipolar transistors having different amplification factorcharacteristics can be produced from one semiconductor wafer.

Consequently, for example, a first semiconductor chip including atransistor having a first amplification factor, a second semiconductorchip including a transistor having a second amplification factordifferent from the first amplification factor, and a third semiconductorchip including a transistor having a third amplification factordifferent from each of the first and second amplification factors can beproduced from one semiconductor wafer. Consequently, for example, evenif a small number of first semiconductor chips are required, a decreasednumber of excessive first semiconductor chips are manufactured from thesemiconductor wafer, and the second semiconductor chips and the thirdsemiconductor chips are not uselessly manufactured from thesemiconductor wafer. This means a reduction in loss due to excessproduction.

In addition, when semiconductor chips having several types ofamplification factor characteristics are manufactured, a particularnumber of semiconductor wafers are not necessary to be used, the numberbeing equal to the number of the types. It is therefore possible todecrease the number of semiconductor wafers to be used formanufacturing. In addition, it is possible to decrease the number ofsteps for manufacturing the semiconductor device. For example, when thesemiconductor chips having several types of amplification factorcharacteristics are manufactured, diffusion treatment is probablyperformed for each of the types of amplification factor characteristicsto form transistors having different amplification factorcharacteristics. In this embodiment, however, the transistors havingdifferent amplification factor characteristics can be formed by one-timediffusion treatment.

In this way, using the method of manufacturing the semiconductor deviceof this embodiment can improve productivity of the semiconductor device,allowing manufacturing cost of the semiconductor device to be reduced.

This embodiment is particularly effective in the case where a largenumber of semiconductor chips can be manufactured from one semiconductorwafer, for example, in the case where a semiconductor wafer used in themanufacturing process has a diameter larger than six inches. Forexample, the number of producible semiconductor chips is two timeslarger in the case of using a semiconductor wafer having a diameter ofeight inches than in the case of using a semiconductor wafer having adiameter of six inches.

This embodiment is particularly effective in the case of performing thediffusion treatment with a vertical furnace. Using the vertical furnaceinstead of the horizontal furnace makes it possible to accuratelycontrol the amplification factor characteristics of transistors in theentire semiconductor wafer. This can prevent excess manufacturing ofuseless semiconductor chips having predetermined amplification factorcharacteristics in the case of using the vertical furnace. Modification

A case where bipolar transistors, which have increased types ofamplification factor characteristics, are formed in an exposure regionthat can be exposed by one exposure step is now described as amodification of this embodiment.

FIG. 17 is a plan view illustrating a manufacturing process of asemiconductor device of this modification. FIG. 17 illustrates anexposure region SH that can be exposed by one exposure step. In thismodification, unlike the layout described with FIG. 8, 30 chip formationregions CE in total are disposed in rows and columns in the exposureregion SH. Six rows of chip formation regions CE exist in the Ydirection while five columns of chip formation regions CE exist in the Xdirection in the exposure region SH.

In the manufacturing method described with FIG. 8, the bipolartransistor TR1 having the first amplification factor characteristics isformed in the first region 1A, the bipolar transistor TR2 having thesecond amplification factor characteristics is formed in the secondregion 15, and the bipolar transistor TR3 having the third amplificationfactor characteristics is formed in the third region 1C in the exposureregion SH. This makes it possible to produce three types ofsemiconductor chips including bipolar transistors having differentamplification factors from one semiconductor wafer.

On the other hand, the types of bipolar transistors formed in theexposure region SH may be increased as in this modification. In FIG. 17,each chip formation region CE shows size of the emitter region formedtherein. Specifically, each chip formation region CE shows a combinationof size in the X direction and size in the Y direction of the emitterregion having a rectangular shape in plan view. FIG. 17 exemplarilyillustrates eight patterns of X1×Y1, X2×Y1, X3×Y1, X1×Y2, X4×Y3, X5×Y1,X6×Y1, and X7×Y4 as types of size of the emitter regions to be formed inone exposure region SH.

FIG. 8 shows a case where transistors having the same amplificationfactor characteristics are formed in any of the chip formation regionsCE arranged in the Y direction in the exposure region SH. However, thechip formation regions CE arranged in the Y direction are not necessaryto have transistors having the same amplification factor characteristicstherebetween.

The semiconductor chips provided in the exposure region have increasedtypes of amplification factor characteristics as in this modification,making it possible to more effectively prevent excess production ofsemiconductor chips having predetermined amplification factorcharacteristics. In addition, since semiconductor chips having increasedtypes of characteristics can be produced from one semiconductor wafer,when many types (specifications) of semiconductor chips are desired tobe produced, a decreased number of semiconductor wafers can be used,leading to a decrease in the number of steps for manufacturing thesemiconductor device.

Although the invention achieved by the inventors has been described indetail according to one embodiment thereof hereinbefore, the inventionshould not be limited thereto, and it will be appreciated that variousmodifications or alterations thereof may be made within the scopewithout departing from the gist of the invention.

What is claimed is:
 1. A method of manufacturing a semiconductor device,comprising the steps of: (a) providing a semiconductor substrate havinga first conductivity type; (b) forming a first semiconductor regionhaving a second conductivity type different from the first conductivitytype over a top of the semiconductor substrate; (c) forming a secondsemiconductor region having the first conductivity type and a thirdsemiconductor region having the first conductivity type over a top ofthe first semiconductor region; and (d) dividing the semiconductorsubstrate into individual pieces, thereby forming a first semiconductorchip including a first transistor including the semiconductor substrate,the first semiconductor region, and the second semiconductor region, anda second semiconductor chip including a second transistor including thesemiconductor substrate, the first semiconductor region, and the thirdsemiconductor region; wherein area of the second semiconductor region issmaller than area of the third semiconductor region in plan view.